journal article·1996-11

Machining of submicron structures on metals and semiconductors by ultrashort UV-laser pulses

P. Simon, J. Ihlemann

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Laser Material Processing Techniques · Diamond and Carbon-based Materials Research · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (14)

Show source-provided references
1. E. Matthias, M. Reichling, J. Siegel, O.W. Käding, S. Petzoldt, H. Skurk, P. Bizenberger, E. Neske: Appl. Phys. A58, 129 (1994)10.1007/BF00332169 ↗
2. S. Preuss, E. Matthias, M. Stuke: Appl. Phys. A59, 79 (1994)10.1007/BF00348424 ↗
3. J. Krüger, W. Kautek: Proc. SPIE2403 (1995)
4. O. Bostanjoglo, R. Niedrig, B. Wedel: J. Appl. Phys.76, 3045 (1994)10.1063/1.357484 ↗
5. S. Preuss, A. Demchuk, M. Stuke: Appl. Phys. A61, 33 (1995)10.1007/BF01538207 ↗
6. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du, G. Mourou: Opt. Commun.114, 106 (1995)10.1016/0030-4018(94)00585-I ↗
7. S. Szatmári, E.P. Schäfer: Opt. Commun.68, 196 (1988)10.1016/0030-4018(88)90184-8 ↗
8. H.W.K. Tom, G.D. Aumiller, C.H. Brito-Cruz: Phys. Rev. Lett.60, 1438 (1988)10.1103/PhysRevLett.60.1438 ↗
9. J.P. Girardeau-Montaut, M. Afif, C. Girardeau-Montaut, S.D. Moustaizis, N. Papadogiannis: Appl. Phys. A62, 3 (1996)10.1007/BF01568079 ↗
10. M. v. Allmen: Laser-Beam Interactions with Materials, Springer Series in Materials Science 2 (1987)10.1007/978-3-642-97007-8 ↗
11. F. Kohlrausch: Praktische Physik Vol. 3, 23. editition, Teubner Stuttgart 1986, p. 99ff
12. Y.Y. Tsui, J. Santiago, Y.M. Li, R. Fedosejevs: Opt. Commun.111, 360 (1994)10.1016/0030-4018(94)90477-4 ↗
13. C.V. Shank, R. Yen, C. Hirlimann: Phys. Rev. Lett50, 454 (1983)10.1103/PhysRevLett.50.454 ↗
14. A. Miklós, Z. Bozóki, A. Lörincz: J. Appl. Phys.66, 2968 (1989)10.1063/1.344178 ↗