A robust high-performance electronic synapse based on epitaxial ferroelectric Hf0.5Zr0.5O2 films with uniform polarization and high Curie temperature
Source abstract
Abstract
Ferroelectric tunnel junction (FTJ) is a promising emerging memristor for the artificial synapse in neuro-inspired computing, which has parallel data processing and low power consumption. The achievement of high-performance electronic synapses requires in-depth exploration of the correlation between the material properties and the device performances as well as the related physical mechanism, which are, however, still quite lacking. We demonstrate here a robust electronic synapse realized by epitaxial ferroelectric Hf0.5Zr0.5O2 (HZO) films with a high Curie temperature of 930 °C and a pristine highly uniform polarization. Based on the optimized ferroelectric HZO film and in-depth understanding of the FTJ mechanism, a robust and high-performance electronic synapse has been successfully realized with high ON/OFF ratio of >500, large continuous conductance regulation range of 1–250 nS and high reliability with the retention of >104 s. Such electronic synapses show good multilevel conductance modulations and synaptic behaviors, such as long-term potentiation (LTP), long-term depression (LTD) and spike-timing dependent plasticity (STDP). A simulated neural network with the synaptic characteristics indicates high recognition accuracy (93.7%) for MNIST database. These results pave a pathway to apply HZO based electronic synapses as the active block in future neuromorphic computing.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Memory and Neural Computing · Ferroelectric and Negative Capacitance Devices · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (70)
Show source-provided references
1. Deep learning10.1038/nature14539 ↗
2. The future of electronics based on memristive systems10.1038/s41928-017-0006-8 ↗
3. Alloying conducting channels for reliable neuromorphic computing10.1038/s41565-020-0694-5 ↗
4. Artificial synapses emulated by an electrolyte-gated tungsten-oxide transistor10.1002/adma.201801548 ↗
5. Gate-tunable synaptic dynamics of ferroelectric-coupled carbon-nanotube transistors10.1021/acsami.9b17742 ↗
6. The future of ferroelectric field-effect transistor technology10.1038/s41928-020-00492-7 ↗
7. Ferroelectric analog synaptic transistors10.1021/acs.nanolett.9b00180 ↗
8. Phase change random access memory for neuro-inspired computing10.1002/aelm.202001241 ↗
9. Characteristic investigation of highly oriented Hf0.5Zr0.5O2 thin-film resistive memory devices10.1063/1.5141132 ↗
10. Density effects of graphene oxide quantum dots on characteristics of Zr0.5Hf0.5O2 film memristors10.1063/1.5089532 ↗
11. Ferroic tunnel junctions and their application in neuromorphic networks10.1063/1.5120565 ↗
12. Solid-state memories based on ferroelectric tunnel junctions10.1038/nnano.2011.213 ↗
13. A robust artificial synapse based on organic ferroelectric polymer
14. Enhanced tunneling electro-resistance ratio for ferroelectric tunnel junctions by engineering metal work function10.1109/LED.2021.3133577 ↗
15. A ferroelectric memristor10.1038/nmat3415 ↗
16. Giant tunnel electroresistance for non-destructive readout of ferroelectric states10.1038/nature08128 ↗
17. Memory technology-a primer for material scientists10.1088/1361-6633/ab8f86 ↗
18. Electroresistance effects in ferroelectric tunnel barriers10.1103/PhysRevB.82.134105 ↗
19. Giant electroresistance of super-tetragonal BiFeO3-based ferroelectric tunnel junctions10.1021/nn401378t ↗
20. HfZrOₓ-based ferroelectric tunnel junction with crested symmetric band structure engineering10.1109/LED.2021.3102226 ↗
21. Reproducible ultrathin ferroelectric domain switching for high-performance neuromorphic computing
22. Learning through ferroelectric domain dynamics in solid-state synapses10.1038/ncomms14736 ↗
23. Ultra-low power Hf0.5Zr0.5O2 based ferroelectric tunnel junction synapses for hardware neural network applications10.1039/C8NR04734K ↗
24. Overcoming the fundamental barrier thickness limits of ferroelectric tunnel junctions through BaTiO3/SrTiO3 composite barriers10.1021/acs.nanolett.6b01418 ↗
25. Ferroelectric capped magnetization in multiferroic PZT/LSMO tunnel junctions
26. Direct observation of ferroelectric field effect and vacancy-controlled screening at the BiFeO3/LaxSr1−xMnO3 interface10.1038/nmat4058 ↗
27. Tunnel electroresistance through organic ferroelectrics10.1038/ncomms11502 ↗
28. Ferroelectricity in hafnium oxide thin films10.1063/1.3634052 ↗
29. Identification of the ferroelectric switching process and dopant-dependent switching properties in orthorhombic HfO2: a first principles insight10.1063/1.4867975 ↗
30. Effects of strain on the electronic, optical, and ferroelectric transition properties of HfO2: Ab initio simulation study10.1088/1361-648X/ac0024 ↗
31. Ferroelectric tunneling junctions based on aluminum oxide/zirconium-doped hafnium oxide for neuromorphic computing10.1038/s41598-019-56816-x ↗
32. The effect of the bottom electrode on ferroelectric tunnel junctions based on CMOS-compatible HfO210.1088/1361-6528/aac6b3 ↗
33. A van der Waals synaptic transistor based on ferroelectric Hf0.5Zr0.5O2 and 2D tungsten disulfide10.1002/aelm.202000057 ↗
34. Tunneling electroresistance effect in a Pt/Hf0.5Zr0.5O2/Pt structure10.1063/1.4977028 ↗
35. Unraveling ferroelectric polarization and ionic contributions to electroresistance in epitaxial Hf0.5Zr0.5O2 tunnel junctions10.1002/aelm.201900852 ↗
36. Blocking of conducting channels widens window for ferroelectric resistive switching in interface-engineered Hf0.5Zr0.5O2 tunnel devices10.1002/adfm.202002638 ↗
37. Magnetic tunnel junctions based on ferroelectric Hf0.5Zr0.5O2 tunnel barriers10.1103/PhysRevApplied.12.031001 ↗
38. Large tunnel electroresistance with ultrathin Hf0.5Zr0.5O2 ferroelectric tunnel barriers10.1002/aelm.202001074 ↗
39. Polarization and resistive switching in epitaxial 2 nm Hf0.5Zr0.5O2 tunnel junctions10.1021/acsaelm.1c00604 ↗
40. Epitaxial ferroelectric Hf0.5Zr0.5O2 thin films and their implementations in memristors for brain-inspired computing10.1002/adfm.201806037 ↗
41. Strain effect on the electrical conductivity of epitaxial La0.67Sr0.33MnO3 thin films10.1016/j.scriptamat.2011.03.021 ↗
42. Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering10.1116/1.5060643 ↗
43. High polarization, endurance and retention in sub-5 nm Hf0.5Zr0.5O2 films10.1039/D0NR02204G ↗
44. A rhombohedral ferroelectric phase in epitaxially strained Hf0.5Zr0.5O2 thin films10.1038/s41563-018-0196-0 ↗
45. Robust ferroelectricity in epitaxial Hf1/2Zr1/2O2 thin films10.1063/1.5041715 ↗
46. Reversible oxygen migration and phase transitions in hafnia-based ferroelectric devices10.1126/science.abf3789 ↗
47. Insights into the atomic structure of the interface of ferroelectric Hf0.5Zr0.5O2 grown epitaxially on La2/3Sr1/3MnO3
48. Growth of (111)-oriented epitaxial and textured ferroelectric Y-doped HfO2 films for downscaled devices10.1063/1.4962431 ↗
49. Thickness- and orientation- dependences of Curie temperature in ferroelectric epitaxial Y doped HfO2 films10.35848/1347-4065/ab6d84 ↗
50. The demonstration of significant ferroelectricity in epitaxial Y-doped HfO2 film10.1038/srep32931 ↗
51. Fabrication of ferroelectric Fe doped HfO2 epitaxial thin films by ion-beam sputtering method and their characterization10.7567/JJAP.57.11UF02 ↗
52. Stabilization of the ferroelectric phase in epitaxial Hf1–xZrxO2 enabling coexistence of ferroelectric and enhanced piezoelectric properties10.1021/acsaelm.1c00122 ↗
53. VESTA 3 for three-dimensional visualization of crystal, volumetric and morphology data10.1107/S0021889811038970 ↗
54. Enhanced ferroelectricity in epitaxial Hf0.5Zr0.5O2 thin films integrated with Si(001) using SrTiO3 templates10.1063/1.5096002 ↗
55. Improvement of endurance in HZO-based ferroelectric capacitor using Ru electrode10.1109/LED.2019.2944960 ↗
56. Epitaxial ferroelectric HfO2 films: growth, properties, and devices10.1021/acsaelm.1c00110 ↗
57. Structural changes underlying field-cycling phenomena in ferroelectric HfO2 thin films10.1002/aelm.201600173 ↗
58. Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode10.1038/nnano.2013.192 ↗
59. Mixed electrochemical–ferroelectric states in nanoscale ferroelectrics10.1038/nphys4103 ↗
60. Observation of strong polarization enhancement in ferroelectric tunnel junctions10.1021/acs.nanolett.9b01878 ↗
61. Effective work function of Pt, Pd, and Re on atomic layer deposited HfO210.1063/1.2336718 ↗
62. Band structure analysis of La0.7Sr0.3MnO3 perovskite manganite using a synchrotron10.1155/2015/746475 ↗
63. A consistent model for short-term instability and long-term retention in filamentary oxide-based memristive devices10.1021/acsami.1c14667 ↗
64. High-precision and linear weight updates by subnanosecond pulses in ferroelectric tunnel junction for neuro-inspired computing10.1038/s41467-022-28303-x ↗
65. Epitaxial ferroelectric La-Doped Hf0.5Zr0.5O2 thin films10.1021/acsaelm.0c00560 ↗
66. Study on the internal field and conduction mechanism of atomic layer deposited ferroelectric Hf0.5Zr0.5O2 thin films10.1039/C5TC01074H ↗
67. Effects of oxygen modification on the structural and magnetic properties of highly epitaxial La0.7Sr0.3MnO3 (LSMO) thin films10.1038/s41598-020-60343-5 ↗
68. Cerebrospinal fluid levels of oxytocin in Prader–Willi syndrome: a preliminary report10.1016/S0006-3223(98)00190-5 ↗
69. Plasticity in memristive devices for spiking neural networks10.3389/fnins.2015.00051 ↗
70. L. Yang, C. Cortes, C.J. Burges. National Institute of Standards and Technology. Gaithersburg, MD, USA. (2016). https://www-s.nist.gov/srmors/certificates/2812.pd.