journal article·2024-07-01Open access

Comparative performance of fluorite-structured materials for nanosupercapacitor applications

Grégoire Magagnin, Jordan Bouaziz, Martine Le Berre, Sara Gonzalez, Damien Deleruyelle, Bertrand Vilquin

APL Materials· Volume 12· Issue 7

Abstract

Over the last fifteen years, ferroelectric (FE) and antiferroelectric (AFE) ultra-thin films based on fluorite-structured materials have drawn significant attention for a wide variety of applications requiring high integration density. AFE ZrO2, in particular, holds significant promise for nanosupercapacitors, owing to its potential for high energy storage density (ESD) and high efficiency (η). This work assesses the potential of high-performance Hf1−xZrxO2 thin films encapsulated by TiN electrodes that show linear dielectric (LD), FE, and AFE behavior. A wake-up effect is observed for AFE ZrO2, a phenomenon barely reported for pure zirconium oxide and AFE materials in general, correlated with the disappearance of the pinched hysteresis loop commonly observed for Zr-doped HfO2 thin films. ESD and η are compared for FE, AFE, and LD samples at the same electrical field (3.5 MV/cm). As expected, ESD is higher for the FE sample (95 J/cm3), but η is ridiculously small (≈55%) because of the opening of the FE hysteresis curve, inducing high loss. Conversely, LD samples exhibit the highest efficiency (nearly 100%), at the expense of a lower ESD. AFE ZrO2 thin film strikes a balance between FE and LD behavior, showing reduced losses compared to the FE sample but an ESD as high as 52 J/cm3 at 3.5 MV/cm. This value can be further increased up to 84 J/cm3 at a higher electrical field (4.0 MV/cm), with an η of 75%, among the highest values reported for fluorite-structured materials, offering promising perspectives for future optimization.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Ferroelectric and Negative Capacitance Devices · Cardiac Structural Anomalies and Repair · MXene and MAX Phase Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Ecole Centrale de Lyon, INSA Lyon, CNRS, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 1 , 69130 Ecully, France

INSA Lyon, Ecole Centrale de Lyon, CNRS, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 2 , 69621 Villeurbanne, France

CNRS, INSA Lyon, Ecole Centrale de Lyon, Universite Claude Bernard Lyon 1, CPE Lyon, INL, UMR5270 3 , 69621 Villeurbanne, France

Funding

M-ERA.NET · Agence Nationale de la Recherche

References (45)

Show source-provided references
1. “Digitalisation and energy,” (International Energy Agency (IEA), 2017), https://www.iea.org/reports/digitalisation-and-energy#overview.
2. Advances in dielectric thin films for energy storage applications, revealing the promise of group iv binary oxides10.1021/acsenergylett.1c00313 ↗
3. A 45 nm logic technology with high-k + metal gate transistors, strained silicon, 9 Cu interconnect layers, 193 nm dry patterning, and 100% Pb-free packaging
4. Recent advances in memory technology
5. Ferroelectricity in hafnium oxide thin films10.1063/1.3634052 ↗
6. Integrated circuit with dielectric layer
7. Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications10.1063/1.3636417 ↗
8. Hafnia and hafnia-toughened ceramics10.1007/bf00541601 ↗
9. Ferroelectricity and antiferroelectricity of doped thin HfO2-based films10.1002/adma.201404531 ↗
10. Polarization switching and correlated phase transitions in fluorite-structure ZrO2 nanocrystals10.1002/adma.202207736 ↗
11. Discovery of nanoscale electric field-induced phase transitions in ZrO210.1002/adfm.202303636 ↗
12. Harnessing phase transitions in antiferroelectric ZrO2 using the size effect10.1002/aelm.202100556 ↗
13. A review on the dielectric materials for high energy-storage application10.1142/s2010135x13300016 ↗
14. Thin HfxZr1−xO2 films: A new lead-free system for electrostatic supercapacitors with large energy storage density and robust thermal stability10.1002/aenm.201400610 ↗
15. Negative capacitance for electrostatic supercapacitors10.1002/aenm.201901154 ↗
16. Ultrahigh energy storage density in superparaelectric-like Hf0.2Zr0.8O2 electrostatic supercapacitors10.1002/advs.202300792 ↗
17. Wake-up effects in Si-doped hafnium oxide ferroelectric thin films10.1063/1.4829064 ↗
18. Evolution of phases and ferroelectric properties of thin Hf0.5Zr0.5O2 films according to the thickness and annealing temperature10.1063/1.4811483 ↗
19. Local structure engineered lead-free ferroic dielectrics for superior energy-storage capacitors: A review10.1016/j.ensm.2021.11.043 ↗
20. The origin of ferroelectricity in Hf1−xZrxO2: A computational investigation and a surface energy model10.1063/1.4916707 ↗
21. Interplay between strain and defects at the interfaces of ultra-thin Hf0.5Zr0.5O2-based ferroelectric capacitors10.1002/aelm.202300171 ↗
22. Dramatic impact of pressure and annealing temperature on the properties of sputtered ferroelectric HZO layers10.1063/1.5110894 ↗
23. Antiferroelectric negative capacitance from a structural phase transition in zirconia10.1038/s41467-022-28860-1 ↗
24. Review and perspective on ferroelectric HfO2-based thin films for memory applications10.1557/mrc.2018.175 ↗
25. Characterization of ferroelectric hafnium/zirconium oxide solid solutions deposited by reactive magnetron sputtering10.1116/1.5060643 ↗
26. Quantification of crystalline phases in Hf0.5Zr0.5O2 thin films through complementary infrared spectroscopy and ab initio supercell simulations10.1021/acsami.3c13848 ↗
27. Ferroelectric and fatigue behavior of Pb(Zr0.52Ti0.48)O3∕(Bi3.15Nd0.85)Ti3O12 bilayered thin films10.1063/1.2838333 ↗
28. Compositionally graded bismuth ferrite thin films10.1016/j.jallcom.2011.05.076 ↗
29. Reliability characteristics of ferroelectric Si:HfO2 thin films for memory applications10.1109/tdmr.2012.2216269 ↗
30. Huge reduction of the wake-up effect in ferroelectric HZO thin films10.1021/acsaelm.9b00367 ↗
31. Insertion of an ultrathin interfacial aluminum layer for the realization of a Hf0.5Zr0.5O2 ferroelectric tunnel junction10.1002/pssr.202100585 ↗
32. Physical mechanisms behind the field-cycling behavior of HfO2-based ferroelectric capacitors10.1002/adfm.201600590 ↗
33. Oxygen vacancy concentration as a function of cycling and polarization state in TiN/Hf0.5Zr0.5O2/TiN ferroelectric capacitors studied by x-ray photoemission electron microscopy10.1063/5.0093125 ↗
34. A study on the wake-up effect of ferroelectric Hf0.5Zr0.5O2 films by pulse-switching measurement10.1039/c5nr05339k ↗
35. Structural changes underlying field-cycling phenomena in ferroelectric HfO2 thin films10.1002/aelm.201600173 ↗
36. Domain pinning: Comparison of hafnia and PZT based ferroelectrics10.1002/aelm.201600505 ↗
37. On the relationship between field cycling and imprint in ferroelectric Hf0.5Zr0.5O210.1063/1.5026424 ↗
38. 2013
39. Ultra-high energy storage density and scale-up of antiferroelectric TiO2/ZrO2/TiO2 stacks for supercapacitors10.1039/d0ta11991a ↗
40. La-doped Hf0.5Zr0.5O2 thin films for high-efficiency electrostatic supercapacitors10.1063/1.5045288 ↗
41. Energy storage performance of ferroelectric ZrO2 film capacitors: Effect of HfO2:Al2O3 dielectric insert layer10.1039/d0ta04984k ↗
42. Scale-up and optimization of HfO2-ZrO2 solid solution thin films for the electrostatic supercapacitors10.1016/j.nanoen.2017.07.017 ↗
43. Doped Hf0.5Zr0.5O2 for high efficiency integrated supercapacitors10.1063/1.4985297 ↗
44. High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates10.1116/1.5060738 ↗
45. Superior and ultrafast energy storage performance of relaxorantiferroelectric HfO2-based supercapacitors10.1016/j.ensm.2023.102931 ↗