journal article·2025-11-01Open access

Growth of tetragonal PtO by molecular-beam epitaxy and its integration into β-Ga2O3 Schottky diodes

Felix V. E. Hensling, Christopher T. Parzyck, Bennett Cromer, Md. Abdullah Al Mamun, Y. Eren Suyolcu, L. Kalaydjian, Indra Subedi, Jisung Park, Kathy Azizie, Qi Song, Peter A. van Aken, Nikolas J. Podraza, Kyeongjae Cho, Debdeep Jena, Huili G. Xing, Kyle M. Shen, Darrell G. Schlom, Patrick Vogt

APL Materials· Volume 13· Issue 11

Abstract

We demonstrate the epitaxial growth of tetragonal platinum monoxide (PtO) on MgO, TiO2, and β-Ga2O3 single-crystalline substrates by ozone molecular-beam epitaxy. We provide synthesis routes and derive a growth diagram under which PtO films can be synthesized by physical vapor deposition. A combination of electrical transport and photoemission spectroscopy measurements, in conjunction with density functional theory calculations, reveal PtO to be a degenerately doped p-type semiconductor with a bandgap of Eg ≈ 1.6 eV. Spectroscopic ellipsometry measurements are used to extract the complex dielectric function spectra, indicating a transition from free-carrier absorption to higher photon energy transitions at E ≈ 1.6 eV. Using tetragonal PtO as an anode contact, we fabricate prototype Schottky diodes on n-type Sn-doped β-Ga2O3 substrates and extract Schottky barrier heights of ϕB > 2.2 eV.
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Research context

OpenAlex topics: Ga2O3 and related materials · GaN-based semiconductor devices and materials · Photocathodes and Microchannel Plates

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, Cornell University 1 , Ithaca, New York 14853,

Max Planck Institute for Solid State Research 2 , Heisenbergstr. 1, 70569 Stuttgart,

Laboratory of Atomic and Solid State Physics, Cornell University 3 , Ithaca, New York 14853,

Stanford Institute for Materials and Energy Sciences, SLAC National Accelerator Laboratory 4 , Menlo Park, California 94025,

Department of Materials Science and Engineering, University of Texas at Dallas 5 , Richardson, Texas 75080,

Department of Physics and Astronomy, University of Toledo 6 , Toledo, Ohio 43606,

Wright Center for Photovoltaic Innovation and Commercialization, University of Toledo 7 , Toledo, Ohio 43606,

School of Electrical and Computer Engineering, Cornell University 8 , Ithaca, New York 14853,

Kavli Institute at Cornell for Nanoscale Science 9 , Ithaca, New York 14853,

Leibniz-Institut für Kristallzüchtung 10 , 12489 Berlin,

Funding

AFOSR/AFRL ACCESS · NSF MRSEC program · NSG Grant

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