Self-activated epitaxial growth of ScN films from molecular nitrogen at low temperatures

Abstract

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · GaN-based semiconductor devices and materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, Cornell University 1 , Ithaca, New York 14853,

School of Applied and Engineering Physics, Cornell University 2 , Ithaca, New York 14853,

Department of Physics, University of North Texas 3 , Denton, Texas 76203,

Kavli Institute at Cornell for Nanoscale Science, Cornell University 4 , Ithaca, New York 14853,

Cornell High Energy Synchrotron Source, Cornell University 5 , Ithaca, New York 14853,

School of Electrical and Computer Engineering, Cornell University 6 , Ithaca, New York 14853,

Department of Materials Science and Engineering, Massachusetts Institute of Technology 7 , Cambridge, Massachusetts 02142,

Funding

Semiconductor Research Corporation · Defense Sciences Office, DARPA · National Science Foundation · Cornell Center for Materials Research · Advanced Research Projects Agency - Energy

References (54)