journal article·2024-12-01Open access

Epitaxial films and devices of transparent conducting oxides: La:BaSnO3

Prosper Ngabonziza, Arnaud P. Nono Tchiomo

APL Materials· Volume 12· Issue 12

Abstract

This paper reviews recent developments in materials science and device physics of high-quality epitaxial films of the transparent perovskite La-doped barium stannate, La:BaSnO3. It presents current efforts in the synthesis science of epitaxial La:BaSnO3 films for achieving reduced defect densities and high electron mobility at room temperature. We discuss the scattering mechanisms and the route toward engineering defect-free epitaxial La:BaSnO3 heterostructures. By combining chemical surface characterization and electronic transport studies, special emphasis is laid on the proper correlation between the transport properties and the electronic band structure of La:BaSnO3 films and heterostructures. For application purposes, interesting optical properties of La:BaSnO3 films are discussed. Finally, for their potential application in oxide electronics, an overview of current progress in the fabrication of La:BaSnO3-based thin-film field-effect transistors is presented together with recent progress in the fundamental realization of two-dimensional electron gases with high electron mobility in La:BaSnO3-based heterostructures. Future experimental studies to reveal the potential deployment of La:BaSnO3 films in optoelectronic and transparent electronics are also discussed.
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Research context

OpenAlex topics: Electronic and Structural Properties of Oxides · Magnetic and transport properties of perovskites and related materials · Advanced Condensed Matter Physics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics and Astronomy, Louisiana State University 1 , Baton Rouge, Louisiana 70803,

Department of Physics, University of Johannesburg 2 , P.O. Box 524 Auckland Park, 2006 Johannesburg,

References (100+)

Show source-provided references
1. Present status of amorphous In–Ga–Zn–O thin-film transistors10.1088/1468-6996/11/4/044305 ↗
2. Transparent conducting oxides10.1557/mrs2000.256 ↗
3. Recent progress in transparent oxide semiconductors: Materials and device application10.1016/j.tsf.2006.12.125 ↗
4. High mobility transparent conducting oxides for thin film solar cells10.1016/j.tsf.2009.09.044 ↗
5. Near-UV emitting diodes based on a transparent p–n junction composed of heteroepitaxially grown p-SrCu2O2 and n-ZnO10.1016/s0022-0248(01)01951-0 ↗
6. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors10.1038/nature03090 ↗
7. Transparent perovskite barium stannate with high electron mobility and thermal stability10.1146/annurev-matsci-070616-124109 ↗
8. 2D doping of proton conductors: BaZrO3-based heterostructures10.1002/aenm.202003267 ↗
9. Progress on perovskite materials for energy application10.1016/j.rechem.2022.100321 ↗
10. Inelastic electron tunneling spectroscopy at high-temperatures10.1002/adma.202007299 ↗
11. Concerning the electricity conductibility and the thermoelectric energy of several heavy metal bonds10.1002/andp.19073270409 ↗
12. Applications and processing of transparent conducting oxides10.1557/mrs2000.147 ↗
13. New n-type transparent conducting oxides10.1557/mrs2000.149 ↗
14. Characterization of transparent conducting oxides10.1557/mrs2000.152 ↗
15. Chemical and thin-film strategies for new transparent conducting oxides10.1557/mrs2000.150 ↗
16. Transparent conducting oxides for photovoltaics10.1557/mrs2007.29 ↗
17. Transparent conductors—A status review10.1016/0040-6090(83)90256-0 ↗
18. 1999
19. Improvement of characteristics of new-type solar cells, having a ‘transparent conductor/thin SiO2 layer with ultrafine metal particles as conductive channels/n-Si’ junction10.1016/0927-0248(95)00025-9 ↗
20. A thin film electrochromic display based on the tungsten bronzes10.1016/0040-6090(76)90283-2 ↗
21. Liquid-crystal display devices10.1038/scientificamerican0470-100 ↗
22. Liquid-crystal displays–electro-optic effects and addressing techniques10.1007/978-1-4684-2175-0_14 ↗
23. Properties of stannic oxide thin films produced from the SnCl4-H2O and SnCl4-H2O2 reaction systems10.1016/0040-6090(78)90009-3 ↗
24. Deposition of In2O3 SnO2 layers on glass substrates using a spraying method10.1016/0040-6090(81)90361-8 ↗
25. Recent advances in electrochromics for smart windows applications10.1016/s0038-092x(98)00074-7 ↗
26. Fundamental advances in transparent conducting oxides10.1557/proc-623-199 ↗
27. Transparent semiconducting oxide films
28. The properties of some reactively sputtered metal oxide films10.1016/0042-207x(53)90411-4 ↗
29. ZITO (ZnO-SnO2-In2O3) transparent conducting oxides: Electrical and optical properties of DC magnetron sputtered films10.1557/PROC-0905-DD01-07 ↗
30. Past achievements and future challenges in the development of optically transparent electrodes10.1038/nphoton.2012.282 ↗
31. High mobility and low threshold voltage transparent thin film transistors based on amorphous indium zinc oxide semiconductors10.1016/j.sse.2007.10.032 ↗
32. Current and future technology of low-temperature poly-Si TFT-LCDs10.1889/1.1828784 ↗
33. The race to replace tin-doped indium oxide: Which material will win?10.1021/nn901903b ↗
34. Performance of sputtered Pb0.92Bi0.07La0.01(Fe0.405NB0.325Zr0.27)O3 ferroelectric memory films10.1080/00150197208235310 ↗
35. Ferroelectric domain switching in rhombohedral-phase PLZT ceramics10.1080/00150197208235305 ↗
36. The pyroelectric properties of the lanthanum-doped ferroelectric PLZT ceramics10.1109/t-su.1972.29672 ↗
37. Application of nonlinear interactions in ferroelectric ceramics to microwave signal processing10.1080/00150197208235315 ↗
38. The research status and device potential of ferroelectric thin films10.1080/00150197208235309 ↗
39. A self-scanned ferroelectric image sensor10.1080/00150197208235316 ↗
40. Photochromics10.1063/1.3021920 ↗
41. High mobility in a stable transparent perovskite oxide10.1143/apex.5.061102 ↗
42. Physical properties of transparent perovskite oxides (Ba,La)SnO3 with high electrical mobility at room temperature10.1103/physrevb.86.165205 ↗
43. Perovskite-type oxides having semiconductivity as oxygen sensors10.1246/cl.1985.377 ↗
44. Electron effective mass and mobility limits in degenerate perovskite stannate BaSnO310.1103/physrevb.95.161202 ↗
45. Defect engineering of BaSnO3 for high-performance transparent conducting oxide applications10.1103/physrevb.87.161201 ↗
46. Probing the electronic structures of ternary perovskite and pyrochlore oxides containing Sn4+ or Sb5+10.1021/ic034551c ↗
47. Wide bandgap BaSnO3 films with room temperature conductivity exceeding 104 S cm−110.1038/ncomms15167 ↗
48. La-doped BaSnO3—Degenerate perovskite transparent conducting oxide: Evidence from synchrotron x-ray spectroscopy10.1063/1.4816511 ↗
49. 2006
50. 2016
51. Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides10.1107/s0567739476001551 ↗
52. Cation-size control of structural phase transitions in tin perovskites10.1088/0953-8984/15/49/010 ↗
53. Materials data on SrSnO3 by materials project
54. Order-disorder octahedral tilting transitions in SrSnO3 perovskite10.1103/physrevb.71.220102 ↗
55. Octahedral tilting in perovskites. I. Geometrical considerations10.1107/s0108768196010713 ↗
56. 2020
57. Structure-property relationships and mobility optimization in sputtered La-doped BaSnO3 films: Toward 100 cm2 v−1 s−1 mobility10.1103/physrevmaterials.5.044604 ↗
58. Combined spectroscopy and electrical characterization of La:BaSnO3 thin films and heterostructures10.1063/5.0105116 ↗
59. Atomic mapping of Ruddlesden-Popper faults in transparent conducting BaSnO3-based thin films10.1038/srep16097 ↗
60. Large thickness dependence of the carrier mobility in a transparent oxide semiconductor, La-doped BaSnO310.1063/1.5033326 ↗
61. Enhancing electron mobility in La-doped BaSnO3 thin films by thermal strain to annihilate extended defects10.1063/1.4954638 ↗
62. Large effects of dislocations on high mobility of epitaxial perovskite Ba0.96La0.04SnO3 films10.1063/1.4812642 ↗
63. Adsorption-controlled growth of La-doped BaSnO3 by molecular-beam epitaxy10.1063/1.5001839 ↗
64. One-step epitaxy of high-mobility La-doped BaSnO3 films by high-pressure magnetron sputtering10.1063/5.0046639 ↗
65. Unraveling the oxygen effect on the properties of sputtered BaSnO3 thin films10.1021/acsaelm.8b00007 ↗
66. Role of oxygen partial pressure on structure and properties of sputtered transparent conducting films of La-doped BaSnO310.1016/j.tsf.2020.137986 ↗
67. Scattering mechanisms and mobility enhancement in epitaxial BaSnO3 thin films probed via electrolyte gating10.1063/5.0017227 ↗
68. Structure and transport in high pressure oxygen sputter-deposited BaSnO3−δ10.1063/1.4919969 ↗
69. Mobility-electron density relation probed via controlled oxygen vacancy doping in epitaxial BaSnO310.1063/1.4983039 ↗
70. Wide-voltage-window reversible control of electronic transport in electrolyte-gated epitaxial BaSnO310.1103/physrevmaterials.3.075001 ↗
71. Microstructural engineering of solution-processed epitaxial la-doped BaSnO3 transparent conducting films10.1021/acs.cgd.1c00698 ↗
72. Solution processing of transparent conducting epitaxial La:BaSnO3 films with improved electrical mobility10.1063/1.4914972 ↗
73. Enhanced electron mobility in epitaxial (Ba,La)SnO3 films on BaSnO3 (001) substrates10.1063/1.4942509 ↗
74. Improvement of electron mobility in La:BaSnO3 thin films by insertion of an atomically flat insulating (Sr,Ba)SnO3 buffer layer10.1063/1.4953808 ↗
75. Epitaxial integration of high-mobility La-doped BaSnO3 thin films with silicon10.1063/1.5054810 ↗
76. Oxygen vacancy-assisted recovery process for increasing electron mobility in n-type BaSnO3 epitaxial thin films10.1038/s41427-018-0038-1 ↗
77. Effects of vacuum annealing on the electron mobility of epitaxial La-doped BaSnO3 films10.1063/1.5054154 ↗
78. High mobility BaSnO3 films and field effect transistors on non-perovskite MgO substrate10.1063/1.4973205 ↗
79. High-mobility BaSnO3 grown by oxide molecular beam epitaxy10.1063/1.4939657 ↗
80. Adsorption-controlled growth and the influence of stoichiometry on electronic transport in hybrid molecular beam epitaxy-grown BaSnO3 films10.1039/c7tc00190h ↗
81. Solid phase epitaxial growth of high mobility La:BaSnO3 thin films co-doped with interstitial hydrogen10.1063/1.4948355 ↗
82. Improved electrical mobility in highly epitaxial La:BaSnO3 films on SmScO3 (110) substrates10.1063/1.4891816 ↗
83. Employing high-temperature-grown SrZrO3 buffer to enhance the electron mobility in La:BaSnO3-based heterostructures10.1063/5.0148467 ↗
84. High-temperature-grown buffer layer boosts electron mobility in epitaxial la-doped BaSnO3/SrZrO3 heterostructures10.1063/1.5094867 ↗
85. Direct observation of electrostatically driven band gap renormalization in a degenerate perovskite transparent conducting oxide10.1103/physrevlett.116.027602 ↗
86. High mobility field effect transistor based on BaSnO3 with Al2O3 gate oxide10.1063/1.4901963 ↗
87. Extended defects and polarity of hydride vapor phase epitaxy GaN10.1007/s11664-002-0096-5 ↗
88. Influence of charged-dislocation density variations on carrier mobility in heteroepitaxial semiconductors: The case of SnO2 on sapphire10.1103/physrevb.86.245315 ↗
89. Dopant-site-dependent scattering by dislocations in epitaxial films of perovskite semiconductor BaSnO310.1063/1.4874895 ↗
90. Scattering of electrons at threading dislocations in GaN10.1063/1.366585 ↗
91. The role of dislocation scattering in n-type GaN films10.1063/1.122012 ↗
92. Dislocation scattering in GaN10.1103/physrevlett.82.1237 ↗
93. 1968
94. 2007
95. 1972
96. Dislocation-independent mobility in lattice-mismatched epitaxy: Application to GaN10.1016/s0038-1098(01)00010-2 ↗
97. First-principles analysis of electron transport in BaSnO310.1103/physrevb.95.205202 ↗
98. Mobility of slow electrons in polar crystals10.1103/physrev.98.414 ↗
99. The mean free path of electrons in polar crystals10.1098/rspa.1939.0080 ↗
100. Description of electron mobilities in epitaxial lanthanum-doped barium stannate films: Influences of LO phonons, threading dislocation, and ionized donor defects10.1063/5.0163172 ↗