Beta gallium oxide (β-Ga2O3) nanoelectromechanical transducer for dual-modality solar-blind ultraviolet light detection
Source abstract
Abstract
Empowered by an ultrawide bandgap (Eg = 4.5–4.9 eV), beta gallium oxide (β-Ga2O3) crystal is an ideal material for solar-blind ultraviolet (SBUV, λ < 280 nm) detection. Here, we report on the first demonstration of dual-modality SBUV light sensing integrated in the same device enabled by multi-physics coupling across photo-electrical and photo-thermo-mechanical domains. The specially designed suspended β-Ga2O3 nanoelectromechanical systems (NEMS) transducer reveals dual-modality responses, with a photocurrent responsivity of 4 mA/W and a frequency shift responsivity of 250 Hz/nW, upon SBUV light exposure. An additional demonstration of a β-Ga2O3 photo-field-effect transistor exhibits a boosted responsivity of 63 A/W. Analysis on the device suggests that reducing the thickness and length of the transducer could further improve the SBUV light sensing responsivities for both modalities. The demonstration could pave the way for future realization of SBUV detectors with dual modalities for enhanced detection fidelity, or respectively optimized for different sensing scenarios.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · Gas Sensing Nanomaterials and Sensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical Engineering and Computer Science, Case School of Engineering, Case Western Reserve University 1 , 10900 Euclid Avenue, Cleveland, Ohio 44106, USA
School of Advanced Materials and Nanotechnology, Xidian University 2 , Xi’an, Shaanxi 710126, China
State Key Laboratory of Crystal Materials and Key Laboratory of Functional Crystal Materials and Device, Shandong University 3 , Jinan, Shandong 250100, China
Funding
National Science Foundation · U.S. Department of Energy · Army Research Office
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