Study of plasma behavior in DC magnetron discharges

The scenario of instabilities, ionization zones, double layers, particle transport, and electron heating in magnetron sputtering discharges is collectively explored in axial–radial planes using fluid simulation. The significance of the design of the magnetic field in the properties of the ionized species is analyzed. The double layer associated particle transport, instability formation, high energy electron generation, and the origin of tangential electric field due to current discontinuity are discussed. Data also reveal that high energy electrons are generated by the acceleration of low energy electrons from the neighboring region by the potential well associated with the double layers. The results of low-temperature magnetized plasmas are analyzed using the concept proposed by Alfvén in the context of solar plasmas.