Show source-provided references
1. Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography
10.1063/1.2907154 ↗2. Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250 W
10.1117/12.2305955 ↗3. High-power EUV light sources (>500 W) for high throughput in next-generation EUV lithography tools
10.1117/12.3010463 ↗6. X-ray production ∼13 nm from laser-produced plasmas for projection x-ray lithography applications
10.1364/ao.32.006897 ↗8. 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources
10.1063/1.2191477 ↗10. Effect of focal spot size on in-band 135 nm extreme ultraviolet emission from laser-produced Sn plasma
10.1364/ol.31.002492 ↗11. Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target
10.1063/1.2820451 ↗12. Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength
10.1063/1.2735944 ↗13. Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production
10.1063/1.2948874 ↗14. Effects of plasma spatial profile on conversion efficiency of laser produced plasma sources for EUV lithography
10.1117/12.813423 ↗15. Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas
10.1063/1.3698628 ↗17. Spectral efficiency of extreme ultraviolet emission from CO2 laser-produced tin plasma using a grazing incidence flat-field spectrograph
10.1088/1009-0630/15/5/08 ↗18. Optimizing laser produced plasmas for efficient extreme ultraviolet and soft X-ray light sources
10.1063/1.4891970 ↗20. On the maximum conversion efficiency into the 13.5-nm extreme ultraviolet emission under a steady-state laser ablation of tin microspheres
10.1063/1.4960684 ↗23. Recycling of laser and plasma radiation energy for enhancement of extreme ultraviolet sources for nanolithography
10.1063/1.5004980 ↗27. Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma
10.1063/1.5117504 ↗28. Tuning laser wavelength and pulse duration to improve the conversion efficiency and performance of EUV sources for nanolithography
10.1063/5.0018576 ↗29. Characterization of angularly resolved EUV emission from 2-μm-wavelength laser-driven Sn plasmas using preformed liquid disk targets
10.1088/1361-6463/ac0b70 ↗31. Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser
10.1364/oe.411539 ↗32. Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 μm wavelength laser
10.1088/1361-6587/ac3c3a ↗33. Enhanced extreme ultraviolet conversion efficiency of a 2 μm laser-driven preformed tin-droplet target using short picosecond pre-pulses
10.1063/5.0136768 ↗34. Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources
10.1063/5.0125936 ↗35. Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma
10.1063/5.0174149 ↗36. I. Fomenkov , EUV source for high volume manufacturing: Performance at 250 W and key technologies for power scaling (2017).
37. Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography
10.7567/jjap.56.036201 ↗38. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources
10.1038/s41598-017-11685-0 ↗40. 2013
41. Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources
10.1063/1.4891762 ↗42. Stagnation layer development from two colliding Sn plasmas for an efficient EUV source
10.1063/1.5080243 ↗43. Experimental study of the dynamics and extreme ultraviolet radiation of laser produced colliding Sn plasmas
10.1063/5.0195110 ↗50. Mode conversion via reflected stepped phase plate in relativistic systems
10.1063/5.0229058 ↗51. Direct acceleration of an annular attosecond electron slice driven by near-infrared Laguerre–Gaussian laser
10.1017/hpl.2021.28 ↗52. FLASH: An adaptive mesh hydrodynamics code for modeling astrophysical thermonuclear flashes
10.1086/317361 ↗53. Monoenergetic proton beam accelerated by single reflection mechanism only during hole-boring stage
10.1017/hpl.2019.40 ↗