journal article·2025-05-01Open access

Study on improving the radiation efficiency of Sn plasma driven by Laguerre–Gaussian lasers

Huiting Ma, Yun Yuan, Zhiyong Shi, Xinyu Xie, Mengjiao Wang, Wenpeng Wang, Chengyuan Ding, Yuxin Leng, Ruxin Li

AIP Advances· Volume 15· Issue 5

Abstract

We present a simulation study on the irradiation of a planar solid tin target using a Laguerre–Gaussian (LG) laser with a wavelength of 2 μm and an intensity of 4 × 1010 W/cm2. Analysis of plasma hydrodynamics revealed that the characteristic hollow intensity profile of the LG laser induced the formation of collisional plasma in the central region. This phenomenon promoted energy transfer from plasma kinetic energy to internal energy, thereby enhancing the conversion efficiency from internal energy to radiation energy. Furthermore, the orbital angular momentum (l = 3) configuration demonstrated optimal radiation efficiency, achieving 3.7%–5.8% compared to conventional Gaussian modes. These results highlight the potential of LG lasers as a promising approach to optimizing extreme ultraviolet source efficiency for future applications.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Laser-induced spectroscopy and plasma · Orbital Angular Momentum in Optics · Laser-Plasma Interactions and Diagnostics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

State Key Laboratory of Ultra-intense Laser Science and Technology, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS) 1 , Shanghai 201800,

School of Nuclear Science and Technology, University of South China 2 , 421001 Hengyang,

School of Physical Science and Technology, Shanghai Tech University 3 , Shanghai 201210,

Funding

Strategic Priority Research Program of the Chinese Academy of Sciences · Science and Technology Commission of Shanghai Municipality · Natural Science Foundation of China · Natural Science Foundation of Shanghai · Key Research Programs in Frontier Science · National Natural Science Foundation of China · Hunan Provincial Natural Science Foundation of China · International Partnership Program of Chinese Academy of Sciences

References (57)

Show source-provided references
1. Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography10.1063/1.2907154 ↗
2. Industrialization of a robust EUV source for high-volume manufacturing and power scaling beyond 250 W10.1117/12.2305955 ↗
3. High-power EUV light sources (>500 W) for high throughput in next-generation EUV lithography tools10.1117/12.3010463 ↗
5. Physical processes in EUV sources for microlithography10.1088/0022-3727/44/25/253001 ↗
6. X-ray production ∼13 nm from laser-produced plasmas for projection x-ray lithography applications10.1364/ao.32.006897 ↗
7. Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas10.1103/physrevlett.95.235004 ↗
8. 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources10.1063/1.2191477 ↗
9. Spectral control of emissions from tin doped targets for extreme ultraviolet lithography10.1088/0022-3727/39/3/010 ↗
10. Effect of focal spot size on in-band 135 nm extreme ultraviolet emission from laser-produced Sn plasma10.1364/ol.31.002492 ↗
11. Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target10.1063/1.2820451 ↗
12. Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength10.1063/1.2735944 ↗
13. Pure-tin microdroplets irradiated with double laser pulses for efficient and minimum-mass extreme-ultraviolet light source production10.1063/1.2948874 ↗
14. Effects of plasma spatial profile on conversion efficiency of laser produced plasma sources for EUV lithography10.1117/12.813423 ↗
15. Time and space resolved visible spectroscopic imaging CO2 laser produced extreme ultraviolet emitting tin plasmas10.1063/1.3698628 ↗
16. Debris mitigation power of various buffer gases for CO2 laser produced tin plasmas10.1088/0022-3727/45/47/475203 ↗
17. Spectral efficiency of extreme ultraviolet emission from CO2 laser-produced tin plasma using a grazing incidence flat-field spectrograph10.1088/1009-0630/15/5/08 ↗
18. Optimizing laser produced plasmas for efficient extreme ultraviolet and soft X-ray light sources10.1063/1.4891970 ↗
19. Spectroscopy of highly charged ions and its relevance to EUV and soft x-ray source development10.1088/0953-4075/48/14/144025 ↗
20. On the maximum conversion efficiency into the 13.5-nm extreme ultraviolet emission under a steady-state laser ablation of tin microspheres10.1063/1.4960684 ↗
21. Time-resolved optical emission spectroscopy diagnosis of CO2 laser-produced SnO2 plasma10.1088/1009-0630/18/9/05 ↗
22. Ion and extreme ultraviolet emission features of CO2 laser produced Sn and SnO2 plasmas10.1016/j.vacuum.2016.10.015 ↗
23. Recycling of laser and plasma radiation energy for enhancement of extreme ultraviolet sources for nanolithography10.1063/1.5004980 ↗
24. Power-law scaling of plasma pressure on laser-ablated tin microdroplets10.1063/1.5010899 ↗
25. Expansion dynamics after laser-induced cavitation in liquid tin microdroplets10.1103/physrevapplied.10.054005 ↗
26. Efficient generation of extreme ultraviolet light from Nd:YAG-driven microdroplet-tin plasma10.1103/physrevapplied.12.014010 ↗
27. Radiation transport and scaling of optical depth in Nd:YAG laser-produced microdroplet-tin plasma10.1063/1.5117504 ↗
28. Tuning laser wavelength and pulse duration to improve the conversion efficiency and performance of EUV sources for nanolithography10.1063/5.0018576 ↗
29. Characterization of angularly resolved EUV emission from 2-μm-wavelength laser-driven Sn plasmas using preformed liquid disk targets10.1088/1361-6463/ac0b70 ↗
30. Characterization of 1- and 2-μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light10.1103/physrevresearch.3.013294 ↗
31. Extreme ultraviolet light from a tin plasma driven by a 2-μm-wavelength laser10.1364/oe.411539 ↗
32. Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 μm wavelength laser10.1088/1361-6587/ac3c3a ↗
33. Enhanced extreme ultraviolet conversion efficiency of a 2 μm laser-driven preformed tin-droplet target using short picosecond pre-pulses10.1063/5.0136768 ↗
34. Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources10.1063/5.0125936 ↗
35. Production of 13.5 nm light with 5% conversion efficiency from 2 μm laser-driven tin microdroplet plasma10.1063/5.0174149 ↗
36. I. Fomenkov , EUV source for high volume manufacturing: Performance at 250 W and key technologies for power scaling (2017).
37. Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography10.7567/jjap.56.036201 ↗
38. Time-resolved two-dimensional profiles of electron density and temperature of laser-produced tin plasmas for extreme-ultraviolet lithography light sources10.1038/s41598-017-11685-0 ↗
39. Laser Optoelectron. Prog. · 2022 · 59 · 092200210.3788/LOP202259.0922002 ↗
40. 2013
41. Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources10.1063/1.4891762 ↗
42. Stagnation layer development from two colliding Sn plasmas for an efficient EUV source10.1063/1.5080243 ↗
43. Experimental study of the dynamics and extreme ultraviolet radiation of laser produced colliding Sn plasmas10.1063/5.0195110 ↗
44. Hollow plasma acceleration driven by a relativistic reflected hollow laser10.1103/physrevlett.125.034801 ↗
45. New optical manipulation of relativistic vortex cutter10.1103/physrevlett.122.024801 ↗
46. Generation of isolated attosecond electron sheet via relativistic spatiotemporal optical manipulation10.1103/physrevresearch.6.013075 ↗
47. Orbital angular momentum of light and the transformation of Laguerre-Gaussian laser modes10.1103/physreva.45.8185 ↗
48. Generation of high-order Laguerre–Gaussian modes by means of spiral phase plates10.1364/ol.39.005094 ↗
49. Helical-wavefront laser beams produced with a spiral phaseplate10.1016/0030-4018(94)90638-6 ↗
50. Mode conversion via reflected stepped phase plate in relativistic systems10.1063/5.0229058 ↗
51. Direct acceleration of an annular attosecond electron slice driven by near-infrared Laguerre–Gaussian laser10.1017/hpl.2021.28 ↗
52. FLASH: An adaptive mesh hydrodynamics code for modeling astrophysical thermonuclear flashes10.1086/317361 ↗
53. Monoenergetic proton beam accelerated by single reflection mechanism only during hole-boring stage10.1017/hpl.2019.40 ↗
54. Transport phenomena in a completely ionized gas10.1103/physrev.89.977 ↗
55. An equation of state code for hot dense matter, based on the QEOS description10.1016/s0168-9002(98)00446-x ↗
56. Radiation transport and atomic physics modeling in high-energy-density laser-produced plasmas10.1017/s0263034600007709 ↗
57. Background gas collisional effects on expanding fs and ns laser ablation plumes10.1007/s00339-014-8268-8 ↗