Simulation and analysis of the temperature change affected by the material and shape of MEMS transducer
Source abstract
Abstract
MEMS electric energy utilization rate is the key parameter affecting firing performance. It has important relationship with its preparation technology, microscale and structure morphology. In order to improve the theory of energy exchange element design for MEMS pyrotechnics, reduce the design error of transducer parameters at microscale. To ensure the performance of MEMS pyrotechnics, in this paper, the influence of the central line of the thin film transducer element on the electrothermal conversion is simulated and analyzed. The electrothermal conversion and temperature characterization of different central lines in the transducer bridge area are calculated by the finite element method. The influence of the central line on the thermal efficiency under microscale is revealed. The corresponding data are obtained.
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Plasma Diagnostics and Applications · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Micro-Electronics Research Institute, Hangzhou Dianzi University 1 , Hangzhou 310018, China
National Key Laboratory of Applied Physics and Chemistry, Shaanxi Applied Physics and Chemistry Research Institute 2 , Xi’an 710061, China
References (13)
Show source-provided references
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