journal article·2022-02-01Open access

Large lateral contact stiffness on Si nanopillar surfaces

Y. Ishii, R. Yanagisawa, N. Watanabe, M. Nomura, N. Sasaki, K. Miura

AIP Advances· Volume 12· Issue 2

Abstract

We studied the lateral contact stiffness (kcontactx) between the tip of a frictional force microscope and a pillar surface to identify the sliding behavior of the tip at the submicrometer scale. The kcontactx and mean lateral force (⟨F⟩) were systematically measured as functions of pillar diameter φ. We found that the kcontactx on a single Si pillar surface increased whereas the ⟨F⟩ rapidly decreased as φ decreased from the micrometer to the nanometer scale. This contradiction could be explained by the change in tip behavior from dynamic sliding to static sticking.
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Research context

OpenAlex topics: Force Microscopy Techniques and Applications · Adhesion, Friction, and Surface Interactions · Mechanical and Optical Resonators

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Physics, Aichi University of Education 1 , Hirosawa 1, Igaya-cho, Kariya 448-8542, Japan

Institute of Industrial Science, The University of Tokyo 2 , 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan

Department of Engineering Science, Graduate School of Informatics and Engineering, The University of Electro-Communications 3 , 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

Funding

JSPS KAKENHI

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