Diameter distribution and formation mechanism of solid-state nanopores prepared by dielectric breakdown
Source abstract
Abstract
The diameter distribution and dielectric breakdown mechanism of solid-state nanopores in a liquid environment are discussed based on the experimental results. We discussed the nanopore formation mechanism from the viewpoint of the statistical correlation between the diameter distribution, the charge to breakdown, and the dissipated energy across the nanopore by changing the field stress. We found that high field stress increases the instability of the uniformity of the nanopore diameter. Similar to the mechanism in the solid situation, the diameter of the nanopore can be uniquely correlated to the dissipated energy in the pore formation process.
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Research context
OpenAlex topics: Nanopore and Nanochannel Transport Studies · Geophysical and Geoelectrical Methods · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences 1 , Beijing 100029, China
University of Chinese Academy of Sciences 2 , Beijing 100049, China
School of Electronic Electrical and Communication Engineering, University of Chinese Academy of Sciences 3 , Beijing 100049, China
Funding
National Natural Science Foundation of China · Opening Project of Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences
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