The adjustable anisotropy field in FeCoTiO/SiO2/FeCoTiO trilayer films by oblique sputtering and stripe patterning

A series of FeCoTiO thin films were deposited on Si (100) substrates using oblique sputtering and stripe patterning at the same time and the static and high frequency magnetic properties were studied in details. For the single-layered films, if the anisotropy fields induced by the two methods are in the same direction, the effective anisotropy field will be greatly enhanced, closed to 300 Oe. But if the two anisotropy fields are perpendicular to each other, there will be an opposite result. In the FM/NM/FM sandwich structures, the influence of shape anisotropy will be suppressed by the exchange coupling effect between the two FM layers. The resonance frequency and permeability are still above 3.5 GHz and 75 even the width of stripes change from 40 µm to 10 µm.