journal article·2015-12-01Open access

Epitaxial growth of M -plane GaN on ZnO micro-rods by plasma-assisted molecular beam epitaxy

Shuo-Ting You, Ikai Lo, Jenn-Kai Tsai, Cheng-Hung Shih

AIP Advances· Volume 5· Issue 12

Abstract

We have studied the GaN grown on ZnO micro-rods by plasma-assisted molecular beam epitaxy. From the analyses of GaN microstructure grown on non-polar M-plane ZnO surface (101̄0) by scanning transmission electron microscope, we found that the ZnGa2O4 compound was formed at the M-plane hetero-interface, which was confirmed by polarization-dependent photoluminescence. We demonstrated that the M-plane ZnO micro-rod surface can be used as an alternative substrate to grow high quality M-plane GaN epi-layers.
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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · ZnO doping and properties · Ga2O3 and related materials

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