Resistivity reduction of low temperature grown p-Al0.09Ga0.91N by suppressing the incorporation of carbon impurity
Abstract
Research context
OpenAlex topics: GaN-based semiconductor devices and materials · Ga2O3 and related materials · Semiconductor Quantum Structures and Devices
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Affiliations
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science 1 , Beijing 100083, China
University of Chinese Academy of Sciences 2 , Beijing 100049, China
Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Sciences 3 , Suzhou 215123, China
Microsystem & Terahertz Research Center, Chinese Academy of Engineering Physics 4 , Chengdu 610200, China
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University 5 , Changchun 130023, China
Funding
National key R&D Program of China · Science Challenge Project · National Natural Science Foundation of China