Finite element analysis of displacement actuator based on giant magnetostrictive thin film

With the rapid development of science and technology, mechanical and electrical equipment become more and more miniature. In order to achieve precise control in less than 1cm3, the giant magnetostrictive thin film has become a research hotspot. The micro displacement actuator with planar and arc film is designed by the dynamic coupling model based on J-A model and magneto-mechanical effect method which is proposed in this paper. The different structure and thickness of films are analyzed by COMSOL Multiphysics software when the current flows through driving coil. After comparing the simulation results with the test ones, it can be seen that the coupling model is accurate and the structure is reliable. At the same time, MATLAB is used to fit the current density-displacement curve and higher order equation is obtained, and then the feasibility of design can be verified. The actuator with arc structure had advantages of small volume, fast response, high precision, easy integration, etc., which has a broad application prospect in the field of vibration control, micro positioning, robot and so on.