Optical method for distance and displacement measurements of the probe-sample separation in a scanning near-field optical microscope
Source abstract
Abstract
In this work, we present an alternative optical method to determine the probe-sample separation distance in a scanning near-field optical microscope. The experimental method is based in a Lloyd’s mirror interferometer and offers a measurement precision deviation of ∼100 nm using digital image processing and numerical analysis. The technique can also be strategically combined with the characterization of piezoelectric actuators and stability evaluation of the optical system. It also opens the possibility for the development of an automatic approximation control system valid for probe-sample distances from 5 to 500 μm.
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Research context
OpenAlex topics: Near-Field Optical Microscopy · Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis
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Affiliations
Tecnológico de Monterrey 1 , Eugenio Garza Sada 2501 Sur, Monterrey, N.L., 64849, Mexico
CONACYT Research Fellow – CICESE 2 , Unidad Monterrey, Alianza Centro 504, Apodaca, NL, 66629,
Mexico 2 , Unidad Monterrey, Alianza Centro 504, Apodaca, NL, 66629,
CICESE, Unidad Monterrey 3 , PIIT, Alianza Centro 504, Apodaca, NL, 66629, Mexico
Funding
Consejo Nacional de Ciencia y Tecnología
References (8)
Show source-provided references
1. Appl. Phys. Lett. · 2013 · 52 · 2808
2. Opt. Express · 2006 · 14 · 598410.1364/OE.14.005984 ↗
3. Opt. Express · 2008 · 16 · 1979910.1364/OE.16.019799 ↗
4. Pohl · 199310.1007/978-94-011-1978-8 ↗
5. Appl. Phys. Lett. · 1999 · 75 · 16010.1063/1.124305 ↗
6. 2002 · 443
7. Rev. Sci. Instrum. · 2000 · 71 · 277610.1063/1.1150691 ↗
8. NANO · 2015 · 10 · 153000510.1142/S1793292015300054 ↗