Structure optimization and simulation analysis of the quartz micromachined gyroscope
Source abstract
Abstract
Structure optimization and simulation analysis of the quartz micromachined gyroscope are reported in this paper. The relationships between the structure parameters and the frequencies of work mode were analysed by finite element analysis. The structure parameters of the quartz micromachined gyroscope were optimized to reduce the difference between the frequencies of the drive mode and the sense mode. The simulation results were proved by testing the prototype gyroscope, which was fabricated by micro-electromechanical systems (MEMS) technology. Therefore, the frequencies of the drive mode and the sense mode can match each other by the structure optimization and simulation analysis of the quartz micromachined gyroscope, which is helpful in the design of the high sensitivity quartz micromachined gyroscope.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Mechanical and Optical Resonators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
National University of Defense Technology 1 College of Mechatronics and Automation, , Changsha, 410073, China
PLA University of Science and Technology 2 Engineering Institute of Engineering Corps, , Nanjing, 210007, China
Funding
NNSFC
References (14)
Show source-provided references
1. Micromachined gyroscopes10.1016/0924-4247(93)00667-S ↗
2. A Z-axis quartz cross-fork micromachined gyroscope based on shear stress detection10.3390/s100301573 ↗
3. Micromachined vibrating gyroscopes10.1117/12.250699 ↗
4. Design and characterization of a novel Z-axis quartz cross-fork micromachined gyroscope10.3901/CJME.2011.01.050 ↗
5. Markets and applications for MEMS inertial sensors
6. A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure10.1016/j.sna.2006.06.043 ↗
7. Error sources in in-plane silicon tuning-fork MEMS gyroscopes10.1109/JMEMS.2006.876779 ↗
8. Dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope10.3390/s91007970 ↗
9. A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour allan deviation bias instability10.1109/JMEMS.2008.2004794 ↗
10. A novel quartz micro-structure based on shear stress detection and its gyroscopic effect10.7498/aps.59.6896 ↗
11. On the mode-matched control of MEMS vibratory gyroscope via phase-domain analysis and design10.1109/TMECH.2009.2023985 ↗
12. A Z-Axis quartz tuning fork micromachined gyroscope based on shear stress detection10.1109/JSEN.2011.2163626 ↗
13. Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test10.1088/0960-1317/18/5/055028 ↗
14. Micromachined inertial sensors10.1109/5.704269 ↗