A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
Source abstract
Abstract
A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device.
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Research context
OpenAlex topics: Photonic and Optical Devices · Adaptive optics and wavefront sensing · Advanced Surface Polishing Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Optics and Electronics 1 State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, , Chinese Academy of Sciences, Chengdu 610209, China
University of Electronic Science and Technology of China 2 School of Optoelectronic Information, , Chengdu 610054, China
University of Chinese Academy of Sciences 3 , Beijing 100049, China
Guilin University of Electronic Technology 4 College of Electronic Engineering and Automatization, , Guilin 541004, China
Funding
NNSFC
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Show source-provided references
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