Natural patterning of templates on GaAs by formation of cracks
Source abstract
Abstract
Substrate pre-patterning is an effective way to overcome large lattice mismatch and suppress threading defects in the growth of heterostructures. In this work, a new concept was proposed to form natural patterns on commercial substrates monolithically by the formation of surface cracks. Tensile strain was intentionally brought in with a GaAs or GaNAs layer above an InGaAs layer on GaAs substrates. Surface crack patterns successfully formed during the strain relaxation. The strain in a 1 μm buffer layer atop the pattern was found effectively relaxed. Detailed residual strain distribution was simulated by the finite element method.
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Research context
OpenAlex topics: Adhesion, Friction, and Surface Interactions · 3D IC and TSV technologies · Electronic Packaging and Soldering Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Chinese Academy of Sciences 1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, , 200050, Shanghai, China
Chalmers University of Technology 2 Department of Microtechnology and Nanoscience, , 41296, Gothenburg, Sweden
Funding
National Natural Science Foundation of China · Chinese Academy of Sciences · Science and Technology Commission of Shanghai Municipality
References (18)
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