journal article·2019-05-01Open access

Machining of optical micro-mold by laser-induced chemical etching

Zihao Gan, Xiaoqiang Peng, Chaoliang Guan

AIP Advances· Volume 9· Issue 5

Abstract

Triangular grating has an important application in modern optical field. The large-scale production of such components can be realized by injection molding process, among which the fabrication of optical molds is the most important technology. This paper proposed to adopt femtosecond laser-induced chemical etching to make a micro-mold based on triangular diffraction gratings. Based on theoretical analysis and processing experiments, we studied the feasibility applied to manufacture the microstructure of optical mold.
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Research context

OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Nanofabrication and Lithography Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

College of Intelligent Science, National University of Defense Technology 1 , Changsha 410073, China

Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology 2 , De Ya Road, Changsha 410073, China

Hunan Key Laboratory of Ultra-Precision Machining Technology 3 , Changsha 410073, China

Funding

National Key Research and Development Program · Science Challenge Project

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