A 16-bit sigma-delta ADC applied in micro-machined inertial sensor
Source abstract
Abstract
This paper presents a low-distortion sigma-delta (Σ-Δ) ADC for micro-machined inertial sensors. The design adopts a single-loop, fourth-order low-pass single-bit modulator with feedforward paths which can ensure the signal transfer lossless and reduce the nonlinearity and power consumption. The chip is manufactured in standard 0.5µm CMOS process, and the area is 2.2mm2. The ADC achieves 108dB signal to noise ratio (SNR) and 110dB dynamic range (DR). Total power consumption is less than 15mW with 5V supply.
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Research context
OpenAlex topics: Analog and Mixed-Signal Circuit Design · CCD and CMOS Imaging Sensors · Advanced MEMS and NEMS Technologies
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Affiliations
Harbin Institute of Technology Department of Microelectronics, , Harbin, 150000, China
Funding
National Natural Science Foundation of China
References (20)
Show source-provided references
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