Responsivity calibration of the extreme ultraviolet spectrometer in the range of 175-435 Å

We reported the relative responsivity calibration of the grazing-incidence flat-field EUV spectrometer between 175 and 435 Å by means of two methods. The first method is implemented by measuring the diffraction efficiency of the grating with synchrotron radiation light source. Considering the transmission efficiency and quantum efficiency of the other optical components in the spectrometer, the total responsivity was then obtained. The second one was carried out by measuring line emissions from C3+, N4+ and O3+ ions at Shanghai high temperature super conductor electron beam ion trap (SH-HtscEBIT). The EUV spectra were also simulated theoretically via a collisional radiative model. In the calculation, the second-order relativistic many-body perturbation theory approach based on the flexible atomic code was used to calculate the energy levels and transition rates; the close-coupling R-matrix approach and relativistic distorted wave method were utilized to calculate the collision strength of electron impact excitation. In comparison with the spectroscopic measurements at EBIT device, the differences between the measured and simulated relative line intensities were obtained. The responsivity calibration for the spectrometer was then achieved by a 3rd degree polynomial function fitting. Our measurement shows that the responsivity between 175 and 435 Å varies by factor of ∼ 46. The two results of calibration demonstrated a consistency within an average deviation of 24%. In addition, an evaluation of our calculations on C iv, N v and O iv line emissions in this wavelength region was given.