Characteristics in the jet region of helium radio-frequency atmospheric-pressure glow discharge with array generators

The two-dimensional spatially extended atmospheric plasma arrays by many parallel radio-frequency glow discharge plasma jets packed densely, represent a feature option of large-scale low-temperature atmospheric plasma technologies with distinct capability of directed delivery of reactive species and good insusceptibility to sample variations. However, it is still a challenge to form plasma jet with large area of uniform active species on a downstream substrate due to the complex interactions between individual jets. This paper proposes to numerically study the strategy and mechanism of control/modulation for the array discharge to produce two-dimensional plasma uniformity in the downstream working area. In this work, a two dimensional fluid model is employed to investigate the characteristics in the jet region of helium radio-frequency atmospheric-pressure glow discharge (RF APGD) with array generators. The influences of upstream discharge characteristics, gas flow and their cooperative effects on the distribution of species densities, gas temperatures and the uniformity of active species in the material treating area is studied, and the essential strategy for the modulation method is acquired. The results will be significant for deep understanding of coupling behaviors of multiple plasma plumes in the RF APGD array and applications of the technology.