Cathodic arc deposited tetrahedral amorphous carbon as thin film contact pressure sensing material

Tetrahedral amorphous carbon (ta-C) film was deposited using the filtered pulsed cathodic arc deposition method. The ta-C structures deposited on high velocity oxygen fuel thermally sprayed steel beam substrates were investigated for piezoresistive properties under direct contact pressing. A load of up to 1.4 GPa was applied with point contact, with no detrimental influence on the material. The linear response for the strain applied homogeneously on the whole film surface and on the local portion of the film surface under a cylindrical contact was observed. A high gauge factor of the measured system of 305 was measured, showing the potential of the material as a good candidate for sensing applications on direct contact measurement devices.