Numerical investigation of characteristics and excitation effects on discharge properties in an inductively coupled plasma torch
Source abstract
Abstract
This paper focuses on an atmospheric-pressure inductively coupled plasma (ICP) torch sustained by an argon discharge. A two-dimensional axisymmetric model is developed for the numerical simulation of the device. Maxwell equations and fluid equations were solved as the governing equations using the COMSOL Multiphysics software. The result presents the electromagnetic fields generated by the ICP, plasma parameters (electron density and temperature), and gas characteristics (gas flow and gas temperature). The study of the effects of excitation parameters (coil current, coil geometry, and coil turns) on plasma characteristics is analyzed.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Plasma Diagnostics and Applications · Plasma Applications and Diagnostics · Dust and Plasma Wave Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Laboratoire d’électrotechnique de Constantine (LEC), Université de Constantine 1 , Constantine 25000, Algeria
Laboratoire de Physique des Gaz et des Plasmas L.P.G.P, Université Paris Saclay 2 , 91405 Orsay, France
References (21)
Show source-provided references
1. Ueber, ‘der Electrizitatsteitung der Gases10.1002/andp.18842570105 ↗
2. Dresvin · 1977
3. Flow and temperature fields in the fire-ball of an inductively coupled plasma10.1109/tps.1976.4316928 ↗
4. A two-temperature model of the inductively coupled rf plasma10.1063/1.338073 ↗
5. Power dissipation of an inductively coupled plasma torch under E mode dominated regime10.3390/mi12070834 ↗
6. Inductively coupled plasma mass spectrometry (ICP-MS)
7. Mathematical simulation of processes in air ICP/RF plasma torch for high-power applications10.1109/TPS.2019.2957676 ↗
8. Three-dimensional time-dependent large eddy simulation of turbulent flows in an inductively coupled thermal plasma torch with a reaction chamber10.1109/tps.2011.2161594 ↗
9. Energy efficiency enhancement of inductively coupled plasma torch: computational study10.3390/ma15155213 ↗
10. Inductively coupled plasma—Atomic emission spectrometry10.1007/s00897970103a ↗
11. Characterization of an atmospheric-pressure helium plasma generated by 2.45-GHz microwave power10.1109/tps.2012.2223238 ↗
12. C. Busse , “Numerical modeling of an inductively coupled plasma (ICP),” Master’s thesis,” Technische Universität Ilmenau (2019).10.22032/dbt.40314
13. Inductively coupled plasma sources and applications10.1155/2010/164249 ↗
14. Investigation of the boron particles behaviour in ICP/RF plasma10.1109/tps.2017.2757261 ↗
15. Comparison of different techniques for the FLUENT©-based treatment of the electromagnetic field in inductively coupled plasma torches10.1140/epjd/e2003-00227-1 ↗
16. 3D numerical characterization of a microwave argon PECVD plasma reactor at low pressure10.1109/tps.2016.2619696 ↗
17. Modélisation numérique d’une installation convertisseur-plasma d’induction en vue d’une commande optimale
18. 2002
19. Modeling of atmospheric-pressure plasma columns sustained by surface waves10.1103/physreve.75.016402 ↗
20. Modeling of microwave-induced plasma in argon at atmospheric pressure10.1103/PhysRevE.85.056404 ↗
21. Thermal and gasdynamic characteristics of an argon induction discharge