An electromagnetic microactuator with tunable dynamic characteristics using a thick-film FePt permanent magnet

We designed an electromagnetic microactuator with tunable dynamic characteristics using a thick-film FePt permanent magnet. FePt is a promising microactuator material because of its low Young’s modulus, high tensile strength, high ultimate strain as a structural material, and high remanence as a permanent magnet. By employing the laser-assisted heating magnetization method, we successfully reprogrammed the magnetization pattern of the FePt thick film, which led to the tuning of the dynamic characteristics of the 3.85 mm (l) × 0.82 mm (w) × 0.023 mm (t) FePt-based cantilever under the same alternating external magnetic field. When only the tip of the cantilever beam is magnetized, or when the tip and center of the same beam are magnetized in opposite phases, the peak gain of the frequency response characteristics of the former can be tuned to be 19 dB higher than that of the latter in the first-order mode and 19 dB lower than that of the latter in the second-order mode.