Atomic-scale microstructure underneath nanoindentation in Al-Cr-N ceramic films
Source abstract
Abstract
In this work, Al-Cr-N ceramic films deformed by nanoindentation were peeled off from silicon substrates and their atomic-scale microstructures underneath the indenter were investigated by high resolution transmission electron microscope (HR-TEM). Dislocations were formed underneath the indenter and they accumulated along nano-grain boundaries. The accumulative dislocations triggered the crack initiation along grain boundaries, and further resulted in the crack propagation. Dislocations were also observed in nano-grains on the lateral contact area. A model was proposed to describe the variation of microstructures under nanoindentation.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced ceramic materials synthesis · Boron and Carbon Nanomaterials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Beijing University of Technology 1 Beijing Key Lab of Microstructure and Properties of Advanced Materials, , Beijing 100124, China
South China University of Technology 2 School of Materials Science and Engineering, , Guangzhou 510640, China
Funding
Construction of Innovative Teams and Teacher Career Development for Universities and Colleges under Beijing Municipality · Foundation for Young Scholars of Beijing University of Technology · National Science Fundation of China
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