Reference-free self-calibrating tip-based scattering-type THz near-field microscopy
Source abstract
Abstract
In this work, we present a quantitative analysis model based on reference-free self-calibration to analyze scattered fields and approach curves on a dielectric substrate for terahertz scattering-type scanning near-field optical microscopy. The results of our model are compared with experimentally measured data and a fully numerical analysis based on a line dipole image method and a quasi-electrostatic approximation. The model is used to extract the effective radius of the tip and the relative permittivity of the silicon substrate to the near-field scattering signal. The measured approach curves on Au and silicon substrates show good agreement with the calculated approach curves, and the refractive index for silicon is precisely determined to be 3.42. For a tip-based THz scattering-type scanning near-field optical microscope, the proposed analysis model allows for the extraction of the effective probe radius and dielectric functions, thereby enabling conclusive measurements of geometric parameters and optical constants.
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Research context
OpenAlex topics: Near-Field Optical Microscopy · Plasmonic and Surface Plasmon Research · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Electrical Engineering, Pohang University of Science and Technology 1 , Pohang 37673, Republic of Korea
Smart Food Manufacturing Project Group, Korea Food Research Institute 2 , Wanju 55365, Republic of Korea
Department of Biological and Agricultural Engineering and Institute for Nanoscience and Engineering, University of Arkansas 3 , Fayetteville, Arkansas 72701, USA
Funding
Samsung Science and Technology Foundation · Institute for Information and Communications Technology Promotion
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