Modified residual gas analyzer for measuring the ion mass-to-charge composition of a repetitively pulsed plasma
Source abstract
Abstract
We describe the use of a modified residual gas analyzer based on a quadrupole mass spectrometer to measure the ion mass-to-charge composition of the plasma of a repetitively pulsed planar magnetron discharge. The pulse duration and frequency parameters necessary to ensure reliable plasma ion composition data are determined. Examples of measurements of the ion mass-to-charge spectra are given.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Diamond and Carbon-based Materials Research
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Affiliations
Institute of High Current Electronics, Russian Academy of Sciences 1 , 2/3 Akademichesky Ave., Tomsk 634055, Russia
Tomsk State University of Control Systems and Radioelectronics 2 , 40 Lenin Ave., Tomsk 634050, Russia
Funding
Russian Science Foundation
References (22)
Show source-provided references
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