Pinch formation and the zippering effect in laser-triggered discharge plasma under various electrode separations
Source abstract
Abstract
In applying a laser-triggered discharge-produced plasma (LT-DPP) as a light source, the most important issues are the supply of fuel and the suppression of a large-scale nonuniformity called the zippering effect. This paper reports pinch formation in LT-DPP under various electrode separations from 4 mm to 10 mm, which provides information for suppressing the zippering effect. Spherically expanding fuel ablated from the cathode becomes visible when the discharge current becomes large. By 100 ns after the laser trigger, the laser-ablated fuel extends 5 mm from the cathode. The width of the fuel reduces gradually with the increase of the current and forms a pinch at the current peak at 200 ns for the case of a 5mm electrode separation. When the electrode separation is larger, neck-like fuel distribution is observed and the pinched portion propagates toward the anode. The condition for reducing the zippering effect is discussed.
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Research context
OpenAlex topics: Plasma Diagnostics and Applications · Laser-induced spectroscopy and plasma · Advancements in Photolithography Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Science, Changchun University of Science and Technology 1 , No.7089, Weixing Road, Changchun 130022, China
Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology (AIST) 2 , Central 2, 1-1-1, Umezono, Tsukuba, Ibaraki 305-8562, Japan
Funding
Ministry of Education, Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology · National Natural Science Foundation of China
References (15)
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