Time frequency property for a micro resonant gas sensor

In this paper, combining dynamics equation of the resonant cantilever with kinetic equation of the adsorption reaction between coatings and the measured gas, a mechanical chemical coupled dynamics equation is proposed. Using the method of multiple scales, the mechanical chemical coupled dynamics equation is resolved. From the solution, using Hilbert transform, changes of the resonant frequency along with time are obtained. The time frequency property of the resonant cantilever during gas adsorption reaction is investigated. Results show that different gases can be distinguished from each other by means of the different time frequency property. Using the method, the measured time is short and there is not special requirement for adsorption reaction rate between coatings and the measured gas. It explores a novel idea for micro resonant chemical sensors.