Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings
Source abstract
Abstract
The mechanical response of optical multilayer dielectric (MLD) diffraction gratings has been studied using nanoindentation. The results are interpreted using a stress-strain model, which reveals a uniaxial yield stress of 4.1 GPa. It is shown that the indentation response of the high-aspect ratio “pillar” geometry (constrained in one transverse direction but free in the other) can be expressed in terms of yield stress rather than material hardness.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Force Microscopy Techniques and Applications
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Affiliations
University of Rochester 1 Department of Mechanical Engineering, , Rochester, New York 14627, USA
University of Rochester 3 Laboratory for Laser Energetics, , Rochester, New York 14627, USA
University of Rochester 2 Materials Science Program, , Rochester, New York 14627, USA
Funding
U.S. Department of Energy
References (10)
Show source-provided references
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