Enhancing the multiple harmonics by step-like cantilever
Source abstract
Abstract
In atomic force microscopy (AFM), the higher modes are highly sensitive to the tip-sample interactions which generate many harmonics. When a higher harmonic is close to the natural frequency of a mode, the harmonic signal is enhanced by a resonance. The step-like cantilever is proposed as an effective design to enhance the higher harmonic signals. The natural frequencies are changed with the variations of the step-like cantilever sizes. By carefully designing the step-like cantilever, the first three modes can be simultaneously excited. A comprehensive map is provided as a guidance of selecting the appropriate geometric parameters.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Mechanical and Optical Resonators · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences 1 , Beijing 100190, China
School of Engineering Science, University of Chinese Academy of Sciences 2 , Beijing 100049, China
Funding
National Natural Science Foundation of China
References (38)
Show source-provided references
1. Appl. Phys. Lett. · 2012 · 101 · 05310610.1063/1.4739416 ↗
2. Appl. Phys. Lett. · 2000 · 77 · 329310.1063/1.1325404 ↗
3. Appl. Phys. Lett. · 2001 · 79 · 445510.1063/1.1429296 ↗
4. Nanotechnology · 2008 · 19 · 38401110.1088/0957-4484/19/38/384011 ↗
5. Phys. Rev. B · 2004 · 69 · 16541610.1103/physrevb.69.165416 ↗
6. Science · 2004 · 305 · 38010.1126/science.1099730 ↗
7. Phys. Rev. B · 2005 · 72 · 23542210.1103/physrevb.72.235422 ↗
8. Phys. Rev. B · 2005 · 71 · 12541610.1103/physrevb.71.125416 ↗
9. ACS Nano · 2017 · 11 · 865010.1021/acsnano.7b04381 ↗
10. ACS Nano · 2013 · 7 · 1038710.1021/nn404845q ↗
11. Appl. Phys. Lett. · 2000 · 76 · 347810.1063/1.126683 ↗
12. Sens. Actuators, A · 2004 · 114 · 18310.1016/j.sna.2003.11.031 ↗
13. Appl. Phys. Lett. · 2002 · 80 · 164610.1063/1.1456543 ↗
14. Appl. Phys. Lett. · 2004 · 84 · 44910.1063/1.1642273 ↗
15. Appl. Phys. Lett. · 2005 · 87 · 24351310.1063/1.2147708 ↗
16. Nat. Nanotechnol. · 2007 · 2 · 50710.1038/nnano.2007.226 ↗
17. J. Micromech. Microeng. · 2009 · 19 · 11500810.1088/0960-1317/19/11/115008 ↗
18. Rev. Sci. Instrum. · 2014 · 85 · 04370310.1063/1.4870409 ↗
19. Nanotechnology · 2016 · 27 · 12550110.1088/0957-4484/27/12/125501 ↗
20. J. Microelectromech. Syst. · 2015 · 24 · 162210.1109/jmems.2015.2428677 ↗
21. J. Mech. Design · 2016 · 139 · 01230310.1115/1.4034836 ↗
22. Rev. Sci. Instrum. · 2017 · 88 · 10610110.1063/1.4991073 ↗
23. Sens. Actuators, A · 2017 · 255 · 5410.1016/j.sna.2017.01.003 ↗
24. Appl. Phys. Lett. · 2008 · 92 · 15190310.1063/1.2909535 ↗
25. Appl. Phys. Lett. · 2006 · 89 · 03310610.1063/1.2226993 ↗
26. Appl. Phys. Lett. · 2015 · 106 · 07190110.1063/1.4909511 ↗
27. J. Mech. Sci. Technol. · 2015 · 29 · 482310.1007/s12206-015-1029-6 ↗
28. Rev. Sci. Instrum. · 2006 · 77 · 07370310.1063/1.2219738 ↗
29. J. Appl. Phys. · 2017 · 121 · 24450510.1063/1.4990276 ↗
30. Rev. Sci. Instrum. · 2015 · 86 · 12500710.1063/1.4937358 ↗
31. Eng. Opt. · 2016 · 49 · 4310.1080/0305215x.2016.1164852 ↗
32. Microsyst. Technol. · 2017
33. J. Sound. Vib. · 2011 · 330 · 556910.1016/j.jsv.2011.07.018 ↗
34. J. Sound. Vib. · 2012 · 331 · 514110.1016/j.jsv.2012.07.014 ↗
35. Sci. China. Technol. Sc. · 2016 · 46 · 437
36. Nat. Nanotechnol. · 2012 · 7 · 21710.1038/nnano.2012.38 ↗
37. Proc. R. Soc. A · 2003 · 459 · 192510.1098/rspa.2002.1115 ↗
38. Sens. Actuators, A · 2013 · 194 · 16910.1016/j.sna.2013.01.029 ↗