Scaling laws of nanorods in two-photon polymerization nanofabrication using a continuous scanning method

We report on the scaling laws of nanorods in two photon polymerization nanofabrication using a continuous scanning method. We focus on a cross-sectional plane of a nanorod to investigate how a moving laser focal spot effects on the photoresist. Under a hypothetical polymerizing threshold of free radicals concentration, lateral and vertical size models were established by transforming the continuously changing photon intensity to an equivalent constant value. A transformational relationship of voxels and nanorods with a same lateral size is deduced to validate the proposed models. In the experiment, voxels were obtained by an ascending scan method while nanorods were fabricated by a cantilever method. The experimental data shows a good agreement with predicted data.