Design of narrow band photonic filter with compact MEMS for tunable resonant wavelength ranging 100 nm

A prototype of planar silicon photonic structure is designed and simulated to provide narrow resonant line-width (∼2 nm) in a wide photonic band gap (∼210 nm) with broad tunable resonant wavelength range (∼100 nm) around the optical communication wavelength 1550 nm. This prototype is based on the combination of two modified basic photonic structures, i.e. a split tapered photonic crystal micro-cavity embedded in a photonic wire waveguide, and a slot waveguide with narrowed slabs. This prototype is then further integrated with a MEMS (microelectromechanical systems) based electrostatic comb actuator to achieve “coarse tune” and “fine tune” at the same time for wide range and narrow-band filtering and modulating. It also provides a wide range tunability to achieve the designed resonance even fabrication imperfection occurs.