Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model
Source abstract
Abstract
The ionization balance of the bismuth-to-tin plasmas is systematically investigated on the basis of a collisional radiative model, which has been generated using a computer algorithm to analyze the level structure of multiple charged ions to construct the model. The atomic energy levels and rate coefficients corresponding to the model are calculated using the HULLAC code. With this method, we investigate the plasma temperature, which is required to obtain emission in the extreme ultraviolet wavelength range from 13.5 nm to the water window.
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Research context
OpenAlex topics: Atomic and Molecular Physics · Laser-induced spectroscopy and plasma · Plasma Diagnostics and Applications
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Affiliations
National Institutes for Quantum and Radiological Science and Technology 1 Kansai Photon Science Institute, , 8-1-7 Kizugawa, Kyoto, 619-0215, Japan
Institute for Laser Technology 2 , 1-8-4 Utsubohonmachi, Nishi-ku, Osaka 550-0004, Japan
Osaka University 3 Institute of Laser Engineering, , 2-6 Yamadaoka, Suita, Osaka 565-0871, Japan
Okayama University 4 Graduate School of Natural Science and Technology, , 1-1 Naka 1-chome, Tsushima, Okayama 700-8530, Japan
Funding
Japan Society for the Promotion of Science
References (16)
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