Design, analysis, and testing of a flexure-based vibration-assisted polishing device
Source abstract
Abstract
A vibration-assisted polishing device (VAPD) composed of leaf-spring and right-circular flexure hinges is proposed with the aim of realizing vibration-assisted machining along elliptical trajectories. To design the structure, energy methods and the finite-element method are used to calculate the performance of the proposed VAPD. An improved bacterial foraging optimization algorithm is used to optimize the structural parameters. In addition, the performance of the VAPD is tested experimentally. The experimental results indicate that the maximum strokes of the two directional mechanisms operating along the Z1 and Z2 directions are 29.5 μm and 29.3 μm, respectively, and the maximum motion resolutions are 10.05 nm and 10.01 nm, respectively. The maximum working bandwidth is 1,879 Hz, and the device has a good step response.
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Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Advanced machining processes and optimization · Piezoelectric Actuators and Control
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechatronic Engineering, Changchun University of Technology , Changchun 130012, China
Funding
Jilin Province Education Department Scientific Research Planning Project · Mico-Nano and Ultra-Precision Key Laboratory of Jilin Province · National Ministry of Science and Technology International Cooperation Project · Science and Technology Department of Jilin Province
References (32)
Show source-provided references
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