journal article·2013-10-01Open access

Super-resolution fluorescence imaging of nanoimprinted polymer patterns by selective fluorophore adsorption combined with redox switching

Yu Yabiku, Shoichi Kubo, Masaru Nakagawa, Martin Vacha, Satoshi Habuchi

AIP Advances· Volume 3· Issue 10

Abstract

We applied a super-resolution fluorescence imaging based on selective adsorption and redox switching of the fluorescent dye molecules for studying polymer nanostructures. We demonstrate that nano-scale structures of polymer thin films can be visualized with the image resolution better than 80 nm. The method was applied to image 100 nm-wide polymer nanopatterns fabricated by thermal nanoimprinting. The results point to the applicability of the method for evaluating residual polymer thin films and dewetting defect of the polymer resist patterns which are important for the quality control of the fine nanoimprinted patterns.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Near-Field Optical Microscopy · Advanced Fluorescence Microscopy Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Tokyo Institute of Technology 1 Department of Organic and Polymeric Materials, , 2-12-1 O-okayama, Meguro, Tokyo 152-8552, Japan

Tohoku University 2 Polymer Hybrid Materials Research Center, Institute of Multidisciplinary Research for Advanced Materials, , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

King Abdullah University of Science and Technology 3 Biological and Environmental Sciences and Engineering Division, , P.O. Box 4700 KAUST, Thuwal 23955-6900, Kingdom of Saudi Arabia

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