Mass spectroscopy of oxygen plasmas with energetic ions

An experimental study of the plasma gas phase in low pressure radiofrequency discharges of oxygen is presented. The plasma phase has been studied by means of mass spectroscopy of the neutral and of the charged species, directly sampling the plasma gas phase. We also measured the ion energy distributions. We have studied the influence of the operating conditions on the plasma gas-phase composition. Ion density and energy have been measured as a function of discharge parameters. In particular, we have identified operating conditions in low pressure discharges allowing the extraction of ions from the plasma state with energies exceeding 50 eV. This makes plasma processing with energetic oxygen ions feasible in our device.