Force characteristic analysis of a magnetic gravity compensator with annular magnet array for magnetic levitation positioning system

Magnetic levitation positioning system (MLPS) is considered to be the state of the art in inspection and manufacturing systems in vacuum. In this paper, a magnetic gravity compensator with annular magnet array (AMA-MGC) for MLPS is proposed. Benefiting from the double-layer annular Halbach magnet array on the stator, the proposed AMA-MGC possesses the advantages of symmetrical force, high force density and small force fluctuation. Firstly, the basic structure and operation principle of the AMA-MGC are introduced. Secondly, the basic characteristics of the AMA-MGC such as magnetic field distribution, levitation force, parasitic force and parasitic torque are analyzed by the three-dimensional finite element analysis (3-D FEA). Thirdly, the influence of structural parameters on force density and force fluctuation is investigated, which is conductive to the design and optimization of the AMA-MGC. Finally, a prototype of the AMA-MGC is constructed, and the experiment shows good agreement with the 3-D FEA results.