Effects of Van der Waals force on natural frequency for micro cantilever
Source abstract
Abstract
In this paper, a dynamics equation of the micro cantilever is presented which includes Van der Waals force. Using the equation, the effects of the Van der Waals force on the natural frequency for the micro cantilever is investigated. Results show that Van der Waals force should be considered for small initial clearance between the micro cantilever and base plate, small cantilever thickness and large cantilever length. To illustrate the analysis, a micro Si cantilever is fabricated and a test of the natural frequencies is done which illustrates the calculative results in this paper.
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Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Experimental and Theoretical Physics Studies
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Affiliations
Yanshan University School of Mechanical Engineering, , Qinhuangdao 066004, China
Funding
Key Basic Research Foundation in Hebei Province of China
References (14)
Show source-provided references
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