The influence of nonideal factors on the capacitance permittivity in a liquid-suspended rotor micro-gyroscope
Source abstract
Abstract
The nonideal factors of a liquid-suspended rotor micro-gyroscope include the gas-liquid two-phase flow voids, medium temperature and its dielectric relaxation, in which the role of the nonideal factors on the capacitor dielectric constant is altered, thereby affecting the capacitance detection precision of the micro-gyroscope. By comparing four different liquid media, the experimental results reveal the nonideal character of the capacitor dielectric constant. The 7# white oil is suitable for use as the liquid-suspended gyro cavity liquid medium.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Advanced MEMS and NEMS Technologies · Geophysics and Sensor Technology
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Affiliations
Harbin Institute of Technology 1 Department of Microelectronics, , Harbin, 150000, China
Harbin University of Science and Technology 2 School of Software, , Harbin, 150000, China
Funding
NSF
References (20)
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