On the integration of ultrananocrystalline diamond (UNCD) with CMOS chip
Abstract
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Force Microscopy Techniques and Applications
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Affiliations
University of Wisconsin-Madison 1 Department of Electrical and Computer Engineering, , Madison, Wisconsin 53706, USA
Argonne National Laboratory 2 Center for Nanoscale Materials, , Argonne, Illinois 60439, USA
University of Texas-Dallas 3 Now with Department of Materials Science and Engineering, , Richardson, Texas 75080, USA
4Department Engineering Physics, University of Wisconsin-Madison, Madison, Wisconsin 53706, USA
Freescale Semiconductor, Inc. 5 Packaging Solutions Development, , 1300 N Alma School Rd, Chandler, Arizona 85224, USA
Funding
Defense Advanced Research Projects Agency · U.S. Department of Energy