Modeling of MOEMS electromagnetic scanning grating mirror for NIR micro-spectrometer

In this paper, the mathematical model is developed for researching the detailed electromagnetic mechanism of MOEMS scanning mirror. We present the relationship between spectral range and optical scanning angle. Furthermore, the variation tendencies of resonant frequency and maximal torsional angle are studied in detail under different aspect ratios of MOEMS scanning mirror and varied dimensions of torsional bar. The numerical results and Finite Element Analysis simulations both indicate that the thickness of torsional bar is the most important factor. The maximal torsional angle appears when the aspect ratio equals to 1. This mathematical model is an effective way for designing the MOEMS electromagnetic scanning grating mirror in actual fabrication.