journal article·2012-06-01Open access

Controlling the electrical properties of ZnO films by forming zinc and oxide bridges by a plasma and electron-assisted process

Norihiro Shimoi, Takamitsu Harada, Yasumitsu Tanaka, Shun-ichiro Tanaka

AIP Advances· Volume 2· Issue 2

Abstract

A new method to produce electrically steady ZnO films without any heating process has been developed by using plasma and electron beams to facilitate bonding between the metallic component and the oxygen on coated ZnO films. Both plasma atmosphere and electron beams can function as sources of nonequilibrium bonding energy, forming bridges between the zinc present in the zinc complex and the oxygen in the ZnO particles to construct a zinc-oxide thin film. Our results confirm that it is possible to achieve low conductive characteristics by controlling the acceleration voltage of electrons used to irradiate the ZnO coating. The electrically steady films fabricated have various potential applications, being particularly well-suited to electrical devices on a plastic medium.
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Research context

OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Copper-based nanomaterials and applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Tohoku University 1 Graduate School of Environmental Studies, , 6-6-20 Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Sony Corporation 2 Sendai Technology Center, Consumer-Professional & Devices Group, , 3-4-1 Sakuragi, Tagajo 985-0842, Japan

Tohoku University 3 Institute of Multidisciplinary Research for Advanced Materials, , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

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