A method for positioning the focal spot location of two photon polymerization
Source abstract
Abstract
In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 μm × 200 μm square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 μm × 200 μm square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height.
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Research context
OpenAlex topics: Nonlinear Optical Materials Studies · Ocular and Laser Science Research · Advanced Fluorescence Microscopy Techniques
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Affiliations
College of Mechanical Science and Engineering, Jilin University 1 , Changchun, Jilin Province 130012, China
Key Laboratory of Micro/Nano and Ultra-precision Manufacturing, School of Mechatronic Engineering, Changchun University of Technology 2 , Changchun, Jilin Province 130012, China
Funding
National Natural Science Foundation of China
References (20)
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