Fabrication of novel biological substrate based on photolithographic process for surface enhanced Raman spectroscopy
Source abstract
Abstract
In this paper, a novel surface-enhanced Raman scattering (SERS) substrate based on Integrated Circuit (IC) process was designed, using photolithography, etching and other processes on the silicon wafer processing. Its surface morphology and Raman activity were characterized and tested. The relationship between the substrate’s photolithographic pattern and its Raman activity, stability and reproducibility has been analyzed and verified, and some suggestions for improvement of processing steps were given. This substrate can be used for the detection of biological proteins and provides a powerful research tool for life science and analytical chemistry research.
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Research context
OpenAlex topics: Gold and Silver Nanoparticles Synthesis and Applications · Biosensors and Analytical Detection · Advanced biosensing and bioanalysis techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Microelectronics, Tianjin University 1 , Tianjin 300072, China
Analysis Center, Tianjin University 2 , Tianjin 300072, China
School of Computer Science and Engineering, Xinjiang University of Finance & Economics 3 , Urumqi, Xinjiang 830012, China
Funding
Science and Technology Support Program of Xinjiang Province · National Natural Science Foundation of China
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Show source-provided references
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