journal article·2019-09-01Open access

V-shaped dislocations in a GaN epitaxial layer on GaN substrate

Atsushi Tanaka, Kentaro Nagamatsu, Shigeyoshi Usami, Maki Kushimoto, Manato Deki, Shugo Nitta, Yoshio Honda, Michal Bockowski, Hiroshi Amano

AIP Advances· Volume 9· Issue 9

Abstract

In this study, V-shaped dislocations in a GaN epitaxial layer on a free-standing GaN substrate were observed. Our investigation further revealed that the V-shaped dislocations were newly generated at the interface in the epilayer rather than propagated from the GaN substrate. V-shaped dislocations consist of two straight parts. The straight parts of the V-shaped dislocations were separated from each other in the m-direction and tilted toward the step-flow direction of the GaN epitaxial layer. The V-shaped dislocations are continuous single dislocations having a Burgers vector component of 1a and an intrinsic stacking fault between their straight parts.
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Research context

OpenAlex topics: GaN-based semiconductor devices and materials · Metal and Thin Film Mechanics · ZnO doping and properties

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institute of Materials and Systems for Sustainability, Nagoya University 1 , Furo-cho, Chikusa-ku 464-8601, Nagoya, Japan

National Institute for Materials Science 2 , 1-1, Namiki, 305-0044 Tsukuba, Japan

Institute of Post-LED Photonics, Tokushima University 3 , 2-1 Minami-Josanjima, 770-8506 Tokushima, Japan

Department of Electrical Engineering and Computer Science, Nagoya University 4 , Furo-cho, Chikusa-ku 464-8603, Nagoya, Japan

Institute of High Pressure Physics, Polish Academy of Sciences 5 , Sokolowska 29/37, Warsaw 01-142, Poland

Akasaki Research Center, Nagoya University 6 , Furo-cho, Chikusa-ku 464-8603, Nagoya, Japan

Venture Business Laboratory, Nagoya University 7 , Furo-cho, Chikusa-ku 464-8603, Nagoya, Japan

Funding

Ministry of Education, Culture, Sports, Science and Technology · Japan Society for the Promotion of Science

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