journal article·2019-04-01Open access

An inclinometer using movable electrode in a parallel plate capacitive structure

S. M. Khan, N. Qaiser, M. M. Hussain

AIP Advances· Volume 9· Issue 4

Abstract

We present an inclinometer which incorporates a movable electrode acting as a pendulum inside a parallel plate capacitor. The movable electrode acts as the bottom plate while the top plate is a fixed metal with varying area in the shape of a triangle. When the bottom plate moves under the influence of gravity, the overlapping area of the two plates of the parallel plate capacitor varies corresponding to a change in capacitance. The relation between the angle of tilt, overlapping area, and output capacitance is derived which is used to covert the output capacitance to the tilt angle. The inclinometer has a range of 50° with a resolution of 0.38° and a response time of ∼130 ms. This design has a pronounced advantage over current methods of making inclinometer. Generally, inclinometers incorporate MEMS-based accelerometers which need complex interface circuitry and are expensive to produce while having redundant features that are not required for inclinometers. Other specialized inclinometers use fluids that are prone to environmental changes and complex to manufacture due to the presence of fluids.
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Research context

OpenAlex topics: Advanced MEMS and NEMS Technologies · Innovative Energy Harvesting Technologies · Advanced Sensor and Energy Harvesting Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

mmh Labs, Electrical Engineering, Computer Electrical Mathematical Science, and Engineering Division (CEMSE), King Abdullah University of Science and Technology (KAUST) 1 , Thuwal 23955-6900, Saudi Arabia

EECS, University of California 2 , Berkeley, California 94720, USA

Funding

King Abdullah University of Science and Technology

References (21)

Show source-provided references
1. 2010 · 214
2. Sensors and Actuators A: Physical · 1997 · 60 · 13410.1016/s0924-4247(97)01387-3 ↗
3. 2004
4. Journal of Microelectromechanical Systems · 2015 · 24 · 93110.1109/jmems.2014.2359633 ↗
5. 2001
6. Proceedings of the IEEE · 2009 · 97 · 51310.1109/jproc.2009.2013612 ↗
7. Sensors and Actuators A: Physical · 2006 · 130 · 28210.1016/j.sna.2006.02.049 ↗
8. 1936
9. 1939
10. 1987
11. Physiotherapy · 1994 · 80 · 61210.1016/s0031-9406(10)60886-3 ↗
12. Japanese Journal of Applied Physics · 2013 · 52 · 06GL0110.7567/jjap.52.06gl01 ↗
13. Japanese Journal of Applied Physics · 2010 · 49 · 06GN1510.1143/jjap.49.06gn15 ↗
14. IEEE Transactions on Industrial Electronics · 2016 · 63 · 2469
15. IEEE Sensors Journal · 2017 · 17 · 470810.1109/jsen.2017.2714689 ↗
16. Advanced Energy Materials · 2018 · 8 · 170222110.1002/aenm.201702221 ↗
17. Journal of Applied Mechanics · 1976 · 43 · 32510.1115/1.3423833 ↗
18. npj Flexible Electronics · 2018 · 2 · 1310.1038/s41528-018-0025-1 ↗
19. npj Flexible Electronics · 2018 · 2 · 2410.1038/s41528-018-0039-8 ↗
20. IEEE Transactions on Electron Devices · 2018 · 65 · 5038
21. Small · 2019 · 1804385